JPS6224977U - - Google Patents
Info
- Publication number
- JPS6224977U JPS6224977U JP11682185U JP11682185U JPS6224977U JP S6224977 U JPS6224977 U JP S6224977U JP 11682185 U JP11682185 U JP 11682185U JP 11682185 U JP11682185 U JP 11682185U JP S6224977 U JPS6224977 U JP S6224977U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- blowing device
- substantially constant
- shaped body
- conveying direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007664 blowing Methods 0.000 claims 5
- 239000011248 coating agent Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 2
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11682185U JPS6224977U (en]) | 1985-07-30 | 1985-07-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11682185U JPS6224977U (en]) | 1985-07-30 | 1985-07-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6224977U true JPS6224977U (en]) | 1987-02-16 |
Family
ID=31001769
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11682185U Pending JPS6224977U (en]) | 1985-07-30 | 1985-07-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6224977U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012201437A (ja) * | 2011-03-24 | 2012-10-22 | Tokyo Electron Ltd | 基板搬送装置及び基板搬送方法 |
-
1985
- 1985-07-30 JP JP11682185U patent/JPS6224977U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012201437A (ja) * | 2011-03-24 | 2012-10-22 | Tokyo Electron Ltd | 基板搬送装置及び基板搬送方法 |
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